Water: Most Important Contaminants in Semiconductor Manufacturing!

Kensington Laboratories
3 min readFeb 8, 2023

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Wafer Handling Equipment

The fabrication manufacturing cycle, which can take between 12 and 20 weeks, is intricate and time-consuming. Fabrication demands a substantial upfront expenditure, and manufacturing calls for expensive machinery. Before a new investment cycle starts, a fab cycle typically lasts six years. Since the entire production is carried out with tiny margins, only a high yield ensures profitability. Therefore, it is crucial to steer clear of scrap and rejections. Moreover, wafer-handling equipment is needed to remove particle contamination. Moisture and temperature levels in semiconductor manufacturing fabrications must be closely monitored to prevent problems with product quality and yield. According to some estimates, inadequate moisture conditions cause 25% of lost income, making water an essential contaminant in semiconductor fabrication. Kensington Labs offers highly accurate manufacturing solutions with quick response times and scalability for various settings for the crucial stages of the production process.

This article will discuss variables like dew point, trace moisture-related humidity, frost point, humidity, and moisture.

High-Tech Semiconductor Manufacturing

Trace moisture may still be present for a highly pure application, such as high-tech nanoscale semiconductor production after contaminants like dust, grease, and other polluting substances have been eliminated. The quality and yield of the product may suffer as a result. The goal should be to limit the amount of water with the use of precise measurements, even though it is impossible to totally remove every single water molecule from the process.

Compressed Quality of Air

Most industrial facilities place a high priority on compressed air purity, and in cleanroom environments, the target excess moisture level is extremely low: target dew point levels might be below 80°C, and typically systems have numerous alarm levels above this target level. In order to achieve highly accurate sensor readings and lower the possibility of expensive over-drying, innumerable devices are extensively tested and calibrated across the whole measurement range. The short response time of different companies’ humidity sensor cells enables prompt alarms that will allow any problems to be swiftly detected and fixed.

Cleanroom HVAC

Heating, ventilation, and air conditioning systems, abbreviated as HAVC for cleanrooms, are frequently incorporated into the air handling or fan filter units. Transmitters available in the market are the best for regulating the air conditioning units, whether in the cleanroom’s walls or the ventilation system. Process contamination, chemical reactions, and problems with electrostatic discharge can all be caused by humidity. It may be necessary to have accuracy tolerances of +/-2% for relative humidity and +/-0.25°C for temperature.

The desired humidity and temperature may change depending on the process being performed in the cleanroom. In any setting, sensor technology provides the following:

  1. Quick response times.

2. Incredibly high levels of precision.

3. Exceptional long-term stability.

4. Lengthy maintenance intervals.

And if you are looking for the best wafer end effector, Kensington Labs is the one-stop solution for it.

Quality of Process Line Gas

High-quality process gases are necessary for cleanroom operations, and keeping an eye on the moisture levels in the gas line stops moisture contamination, which can lead to material loss. The dew point is the appropriate characteristic to track in order to minimize moisture, which is the primary goal. Fast response times and condensation tolerance are crucial factors to consider when choosing a sensor because they can assist assure dependable operations and a smooth process ramp-up even after a lengthy period of downtime.

Utilizing a unique design and algorithm, the autocalibration feature of numerous brands removes the effects of environmental aging on the sensor structures. The capacity to monitor sensor performance over time enables the sensor to adjust variations in sensitivity to improve long-term stability, extending its life beyond conventional sensors and minimizing the impact of complex environmental conditions on its performance. These sensors also offer a rapid response time, allowing for a quick response to stop the loss of materials in the case of a system breakdown.

Therefore, use the best wafer handling equipment to maintain the quality and to remove any kind of particle contamination. For detailed information, feel free to contact Kensington Labs.

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Kensington Laboratories
Kensington Laboratories

Written by Kensington Laboratories

Kensington Laboratories is a leading supplier of wafer handling robots, precision motion control, integrated stages, linear stages and rotary stages since 1976.

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