A Brief Introduction to Wafer Handling Equipment, Wafer Cassette Mapping & Stage Repair
Due to the growing numbers of semiconductor FABs (microchip manufacturing plants), the demand for robotic systems is getting high as it plays a vital role in handling the material from both front-end and back-end. There are several processes, including the transformation of wafers can be made by the wafer handling equipment to increase the speed of the machines. Apart from that, the implementation of high-tech control methods, fully-improved manipulation capabilities, elegant mechanical design systems, and direct-drive actuation are the various operations that boost the performance with high accuracy.
How Robot Handling Systems (RHS) Support in Task Manipulation?
The essential functions of robot handling systems for task manipulation are given below:
1. The RHS allows a restricted straight-line movement to place the wafer in the center position.
2. Once the wafer sets the positioning in the center, the straight line segment connects the process chamber, open cassette, FOUP with the longitudinal axis.
3. In the next step, the linear motion coordinated with vertical movement to adjust the in-accurate positioning of the robotic-arm deflection.
4. Based on the straight line segment, the wafer handling equipment works on the distinct RHS mechanical structures and functions to manipulate the task operations.
Types of Wafer Handling Equipment/ Wafer Handling Robots
1. Multilink Scara Wafer Robot
The Multilink Scara wafer robot is the reliable and robust semiconductor wafer handling robot/equipment which fulfills the needs of quartz substrate by using the beam wafer sensors and end-grip end-effector. Multiple link wafer robots of SCARA include the semiconductor spectrum; likewise, the etch systems and deposition systems, thermal processing, and reticle process systems. The features of using the multi-link wafer handling robots are position repeatability, high-resolution optical encoders on all axes. The high position accuracy, single and dual-arm configurations are also possible with this fantastic machine.
2. Random Access Cylindrical WFH (Wafer Handling Robot)
It is another fully reliable cylinder-shaped wafer managing robot that gives high-throughput, broad recovery intelligence, simple commands, real-time sensing, an off-axis barcode reader to maintain the process. Moreover, WFH proffers a class 1 cleanroom applications, exceptional repeatability, flexible Wafer end-effectors to meet the high standards of performance capabilities.
Besides, the additional characteristics of WFH are precision motion control integration that can easily support the automatic robot systems. It provides the 3” to 8” availability of semiconductors to ensure no electromechanical changeovers.
What is Wafer Cassette Mapping?
The process of transferring and storing the semiconductor wafers in the cassette is called wafer cassette mapping. Wafer cassette is also considered a wafer carrier that provides the maximum protection to wafer against the gaseous elements, nanoparticles, dust & dirt, etc.
What are the Different Kinds of Wafer Cassettes Online?
The 6” and 8” wafer carriers are widely available online, yet it may vary as per the location and brand which one decides while shopping.
Let’s have a glance at the three distinct dimensions of wafer cassettes mapping.
DI Dimension
It is used for measuring the total distance of the cassette from one end to the center position of the wafer pocket.
Pocket Spacing
The measurement of every wafer pocket from the centerline to the total distance is called pocket spacing.
Pocket Flat
The wafer pocket, which comprises a linear distance, is defined as the pocket flat wafer cassette mapping.
Difference Between 6” Wafer Carrier & 8” Wafer Carrier
Both the 6” and 8” wafer cassette may hold the 25 slots, yet the hallmarks are different. For instance — 155mm/6-inch carrier wafers are free from the hydrolytic, chemical, and heat resistance. It incorporates the non-porous surfaces and utilizes the advanced versions of antistatic materials. However, from customization, durability, high precision control to RFID (customer-specific identification) devices can be furnished with 200mm/8-inch wafer carriers without any hassle.
Precision Motion Control Stage Repairs & Spares
The motion control stage repair and spares are the automated products that are built with the wafer handling robots for boosting the operating life of the machines. In general, the primary purpose of the spares and repairs programs is to drive the exceptional service for running the device for a more extended period and to avoid optimize capital investment and obsolescence.
Some Examples of Stages
Contract Manufacturing Services
The commercial and technical benefits can be achieved with the contract manufacturing services in stage & repair. There is no need to pay the additional inventory cost after getting the contract services from manufacturers.
Gantry Stage Precision Control Systems
Gantry stage precision control serves the tailored-fit operations, flexibility, high-accurate speed to fulfill the basic requirements of travel range & velocity. It gives the assurance of low-cost ownership, heat-resistance, and noise-free movements. Additionally, when it comes to solving the issues with stage repair, the full stage product line integration can aid in meeting the position requirement with optical encoders.
XYZ & Rotary stage
XYZ and rotatory stage platforms are designed to encounter the needs of precision motion control. During this process, it operates the standalone system to present the fast, smooth movements without creating the dependence of hysteresis and backlash linking. Also, the delivery of real-time force sensors makes sure that the programs will work safely during operations.
Conclusion
The innovative functionalities of wafer handling equipment, stage repair precision control system and wafer cassette mapping are the one-stop solutions to increase the performance of semiconductors.
